Investigation of the electron emission from pores in a diamond porous membrane
- V.P. Mammana
- S. Anders
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electrical testing of gold nanostructures by conducting atomic force microscopy
- Alexander Bietsch
- M. Alexander Schneider
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
All-photoplastic, soft cantilever cassette probe for scanning force microscopy
- G. Genolet
- M. Despont
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Energy-dependent conduction band mass of SiO2 determined by ballistic electron emission microscopy
- Andreas Schenk
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
MARS: Femtosecond laser mask advanced repair system in manufacturing
- Richard Haight
- Dennis Hayden
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Near-field distribution in light-coupling masks for contact lithography
- Michael Paulus
- Bruno Michel
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Application of 4-methyl-1-acetoxycalix[6]arene resist to complementary metal-oxide-semiconductor gate processing
- Michael J. Rooks
- Ari Aviram
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Projection reduction exposure with variable axis immersion lenses: Next generation lithography
- H.C. Pfeiffer
- R.S. Dhaliwal
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Liquid immersion deep-ultraviolet interferometric lithography
- J. Hoffnagle
- W.D. Hinsberg
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High emittance source for the PREVAIL projection lithography system
- S.D. Golladay
- R.A. Kendall
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures