Modeling and simulation of transistor performance shift under pattern-dependent RTA process
- Yun Ye
- Frank Liu
- et al.
- 2009
- SPIE Advanced Lithography 2009
Publications
3548 results for Mathematical Sciences
Parameter-specific electronic measurement and analysis of sources of variation using ring oscillators
- Lynn T.-N. Wang
- Liang-Teck Panga
- et al.
- 2009
- SPIE Advanced Lithography 2009
The measurement uncertainty challenge of advanced patterning development 727203
- Narender Rana
- Chas Archie
- et al.
- 2009
- SPIE Advanced Lithography 2009
Cr migration on 193nm binary photomasks
- John Bruley
- Geoffrey Burr
- et al.
- 2009
- SPIE Advanced Lithography 2009
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture
- Gregory McIntyre
- Richard Tu
- 2009
- SPIE Advanced Lithography 2009
Testing low-degree polynomials over prime fields
- Charanjit S. Jutla
- Anindya C. Patthak
- et al.
- 2009
- Random Structures and Algorithms
A family of linear programming algorithms based on an algorithm by von Neumann
- Joao P. M. Goncalves
- Robert H. Storer
- et al.
- 2009
- Optimization Methods and Software
Source optimization for three-dimensional image designs through film stacks
- David O. S. Melville
- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Advanced Lithography 2009
A computational technique to optimally design in-situ diffractive elements: Applications to projection lithography at the resist resolution limit
- Gonzalo R. Feijóo
- Jaione Tirapu-Azpiroz
- et al.
- 2009
- SPIE Advanced Lithography 2009
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
- Hiroshi Ito
- Linda K. Sundberg
- et al.
- 2009
- SPIE Advanced Lithography 2009