Publications

14467 results for Physical Sciences

Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- - E.A. Irene
  - D.W. Dong
- 2019
- JES
Paper
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Paper
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Paper
Solar Cells on Large-Grain GaAs Thin Films
- - S.M. Vernon
  - A.E. Blakeslee
  - et al.
- 2019
- JES
Paper
On Fitting Error Functions to Data
- - R. Ghez
  - M.B. Small
- 2019
- JES
Paper
Post-Epitaxial Polysilicon and Si3N4 Gettering in Silicon
- - M.C. Chen
  - V.J. Silvestri
- 2019
- JES
Paper
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- - V.J. Silvestri
  - V.L. Rideout
  - et al.
- 2019
- JES
Paper
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Paper
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- - R.S. Horwath
- 2019
- JES
Paper