S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
No abstract available.
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Julien Autebert, Aditya Kashyap, et al.
Langmuir
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008