Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.A. Chao
Physical Review B
T. Schneider, E. Stoll
Physical Review B
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science