Electromigration and reliability in submicron metallization and multilevel interconnection
- Thomas Kwok
- 1993
- Materials Chemistry and Physics
Review
Publications
14468 results for Physical Sciences
Temperature-Dependent Composition, Ordering, and Band Bending at Gap(100) Surfaces
- C.L. Lin
- L.J. Brillson
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperTrapping and Behavior of Particulates in a Radio Frequency Magnetron Plasma Etching Tool
- Edward F. Patterson
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDensity of States and Hot Electron Effects in Ballistic Electron Emission Spectroscopy
- R. Ludeke
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperControl of as Diffusion using Ultrathin Metal Passivating Layers at GaAs(100) Surfaces
- P.D. Kirchner
- G.D. Pettit
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDynamics of the Desorption of D2and H2from Cu(111)
- C.T. Rettner
- H.A. Michelsen
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperRole of Stress Relief in the Hexagonai=Close=Packed to Face-Centered-Cubic Phase Transformation in Cobalt Thin Films
- D.A. Smith
- K. Barmak
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperScanning Tunneling Microscope Tip-Sample Interactions: Atomic Modification of Si and Nanometer Si Schottky Diodes
- Ph. Avouris
- I.-W. Lyo
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperTunnel Current Controlled Atomic Force Microscope Designs
- P.J. Bryant
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperForce Microscopy with Actively Stabilized Differential Fiber Detection Mechanism
- H.K. Wickramasinahe
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper