Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
We present the design and theory of operation of a new fiber-optic detection mechanism for force microscopy. The technique comprises a differential fiber Michelson interferometer, in which most spurious signals due to environmental variations are automatically rejected. Any residual fluctuations are canceled by the action of a feedback mechanism, which also ensures operation at maximum sensitivity. This detection technique is capable of high sensitivity response to both high and low frequency tip variations, and can thus be used in the attractive and repulsive modes. A number of results are presented on the applications of a force microscope utilizing this detection mechanism. Both ac and dc modes of operation are demonstrated. © 1993, American Vacuum Society. All rights reserved.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
J.Z. Sun
Journal of Applied Physics
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering