Photolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
Paper
Publications
14468 results for Physical Sciences
Effects of a Diblock Copolymer on Adhesion between Immiscible Polymers. 1. PS-PMMA Copolymer between PS and PMMA
- H.R. Brown
- K. Char
- et al.
- 1993
- Macromolecules
PaperSurface tension and atomic interactions in simple liquids argon, krypton and xenon
- J.A. Barker
- 1993
- Molecular Physics
PaperSandpiles and diffusion-limited reactions
- Joachim Krug
- 1993
- Physical Review E
PaperOxidation kinetics of YBa2Cu3O7-γ thin films in different oxidizing ambients
- Arunava Gupta
- 1993
- Applied Surface Science
PaperIn situ crystallization of amorphous silicon in the transmission electron microscope
- J.L. Batstone
- 1993
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
PaperLateral down-scaling of selective area MOVPE-grown GaInAs/InP wires and dots
- H. Rothuizen
- P. Roentgen
- et al.
- 1993
- Microelectronic Engineering
PaperDirectionality of Sputtered Cu Atoms in A Hollow Cathode Enhanced Planar Magnetron
- S.M. Rossnagel
- J.J. Cuomo
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCombined Buckling and Cracking of Films
- M.D. Thouless
- 1993
- JACerS
PaperEffects of residual stresses in the blister test
- H.M. Jensen
- M.D. Thouless
- 1993
- Int. J. Solids Struct.
Paper