Silicon oxidation during bilayer resist etching
- Mark A. Hartney
- Justin N. Chiang
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
9296 results for Computer Science
A suprathreshold ferry-porter law: Implications for the measurement of display flicker
- Bernice E. Rogowitz
- 1989
- Proceedings of SPIE 1989
Conference paperThe role of unsteady adiabatic expansion in laser sputtering
- Roger Kelly
- 1989
- Proceedings of SPIE 1989
Conference paperSecond-harmonic diffraction from periodically modulated molecular monolayers
- T.F. Heinz
- T. Suzuki
- 1989
- Proceedings of SPIE 1989
Conference paperLaser photothermal effects for measurements and materials processing
- Andrew C. Tam
- 1989
- SPIE OE/LASE 1989
Conference paperAblation of polymers and tissue by ultraviolet lasers
- R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Conference paperCritical issues in high density magnetic and optical data storage
- Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Conference paperPractical characterization of 0.5 μm optical lithography
- Donis G. Flagello
- Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Conference paperTwo-regime ablative hole formation process in tellurium and tellurium-alloy films
- M. Chen
- V. Marrello
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperZero-Misalignment lithographic process using a photoresist with wavelength-selected tone
- William D. Hinsberg
- Scott A. MacDonald
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper