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- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paper
Publications
26865 results for Science
Modeling and experiments of non-telecentric thick mask effects for EUV lithography
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- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paperFlare evaluation of ASML alpha demo tool
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- Gregory McIntyre
- et al.
- 2009
- SPIE Advanced Lithography 2009
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- R.K. Nesbet
- 2009
- International Journal of Quantum Chemistry
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- R.K. Nesbet
- 2009
- International Journal of Quantum Chemistry
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- R.K. Nesbet
- 2009
- International Journal of Quantum Chemistry
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- D. Henderson
- J.A. Barker
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- 2009
- International Journal of Quantum Chemistry
PaperGreen's function scattering‐theoretic methods for point defects, surfaces, and interfaces in solids
- S.T. Pantelides
- J. Bernholc
- et al.
- 2009
- International Journal of Quantum Chemistry
PaperStudy of the electronic structure of molecules. XI. Comments on some present aspects and tentative extrapolations
- E. Clementi
- 2009
- International Journal of Quantum Chemistry
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- P.S. Bagus
- A.J. Freeman
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- 2009
- International Journal of Quantum Chemistry
Paper