Materials evaluation of antireflective coatings for single-layer 193-nm lithography
- Roderick R. Kunz
- Robert D. Allen
- 1994
- Microlithography 1994
Conference paper
Publications
9296 results for Computer Science
(1) Recent developments in VUV femtosecond pulse generation; (2) proposal for a higher efficiency F2 (157-nm) laser
- J.H. Glownia
- D.R. Gnass
- et al.
- 1994
- SPIE OE/LASE 1994
Conference paperCan hospitals afford digital storage for imagery?
- W.F. Cody
- H.M. Gladney
- et al.
- 1994
- SPIE Medical Imaging 1994
Conference paperOptoelectronics technology consortium (OETC): Progress andplan
- David K. Lewis
- Philip J. Anthony
- et al.
- 1994
- SPIE OE/LASE 1994
Conference paperUse of scatterometric latent image detector in closed loop feedback control of linewldth
- John Sturtevant
- Steve Holmes
- et al.
- 1994
- Microlithography 1994
Conference paperBase-class composition with multiple derivation and virtual bases
- Lee R. Nackman
- John J. Barton
- 1994
- CTEC 1994
Conference paperHotWire - A visual debugger for C++
- Chris Laffra
- Ashok Malhotra
- 1994
- CTEC 1994
Conference paperMotion video analysis using planar parallax
- Harpreet S. Sawhney
- 1994
- IS&T/SPIE Electronic Imaging 1994
Conference paperRetrieving images by 2D shape: A comparison of computation methods with human perceptual judgments
- Brian Scassellati
- Sophoclis Alexopoulos
- et al.
- 1994
- IS&T/SPIE Electronic Imaging 1994
Conference paperObtaining clique, cover and coefficient reduction inequalities as Chvatal-Gomory inequalities and Gomory fractional cuts
- B.L. Dietrich
- L.F. Escudero
- 1994
- EJOR
Paper