Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and its Relationship to Fluorocarbon Polymer Formation
- M.M. Millard
- E. Kay
- 2019
- JES
Publications
14338 results for Physical Sciences
Etching Silicon with Fluorine Gas
- M. Chen
- V.J. Minkiewicz
- et al.
- 2019
- JES
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
Preparation and Characterization of Ruthenium Dioxide Crystals
- M.W. Shafer
- R.A. Figat
- et al.
- 2019
- JES
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- V.J. Silvestri
- C.M. Osburn
- et al.
- 2019
- JES
The Dependence of the Memory Effect in ZnS:Mn A-C Thin Film Electroluminescence on Mn Distribution
- V. Marrello
- A.A. Onton
- 2019
- JES
An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- E.A. Irene
- D.W. Dong
- 2019
- JES