Characterization of epitaxial germanium grown on (La xY 1-x) 2O 3 Si(111) using different surfactants
- E.J. Preisler
- S. Guha
- 2005
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Microstructure and properties of ultrathin amorphous silicon nitride protective coating
- Bing K. Yen
- Richard L. White
- et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thin film deposition with physical vapor deposition and related technologies
- S.M. Rossnagel
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanofabrication
- Christie R.K. Marrian
- Donald M. Tennant
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal deposition with femtosecond light pulses at atmospheric pressure
- R. Haight
- P. Longo
- et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal-organic interface and charge injection in organic electronic devices
- J. Campbell Scott
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Time development of microstructure and resistivity for very thin Cu films
- S.M. Rossnagel
- T.S. Kuan
- 2002
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface etching mechanism of silicon nitride in fluorine and nitric oxide containing plasmas
- B.E. Kastenmeier
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas utilization in remote plasma cleaning and stripping applications
- B.E. Kastenmeier
- G.S. Oehrlein
- et al.
- 2000
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films