Phase transformation of thin sputter-deposited tungsten films at room temperature
- S.M. Rossnagel
- I.C. Noyan
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
Date
Featured collections
Popular topics
168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
- H. Kim
- C. Cabral
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Patterning pentacene organic thin film transistors
- Ioannis Kymissis
- Christos D. Dimitrakopoulos
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Influence of resist components on image blur in a patterned positive-tone chemically amplified photoresist
- F.A. Houle
- W.D. Hinsberg
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nanoscale patterning using self-assembled polymers for semiconductor applications
- K.W. Guarini
- C.T. Black
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thermomechanical distortions of the PREVAIL mask system during exposure
- P.-T. Lee
- C. Martin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Contactless testing of wiring networks by an electron beam system utilizing induced current detection
- S.D. Golladay
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PREVAIL-EPL alpha tool: Early results
- S.D. Golladay
- H.C. Pfeiffer
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thin film confinement effects on the thermal properties of model photoresist polymers
- Christopher L. Soles
- Eric K. Lin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures