Properties of reactively sputtered tungsten films in nitrogen and oxygenK.Y. AhnS.B. Brodskvet al.1986JVSTA
Summary Abstract: Non-bulk-like physical properties of thin films due to ion bombardment during film growthEric Kay1986JVSTA
Summary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfacesJ.E. DemuthT.C. Clark1986JVSTA
Summary Abstract: High temperature decomposition of SiO2at the Si/SiO2 interfaceG.W. RubloffR.M. Trompet al.1986JVSTA
Effect of the sintering process on the formation and passivation of PtSiH.-C.W. HuangF.E. Tureneet al.1986JVSTA