Contact and metallization problems in GaAs integrated circuits
- N. Braslau
- 1986
- JVSTA
Paper
Publications
176 results at JVSTA
Laser ablation of polymers
- J.T.C. Yeh
- 1986
- JVSTA
PaperInteraction of metals with model polymer surfaces: Core level photoemission studies
- P.N. Sanda
- J.W. Bartha
- et al.
- 1986
- JVSTA
PaperCatalytic oxidation of niobium by rare earths
- Maria Ronay
- 1986
- JVSTA
PaperSummary Abstract: Non-bulk-like physical properties of thin films due to ion bombardment during film growth
- Eric Kay
- 1986
- JVSTA
PaperThin films for magnetic recording technology: A review
- J.K. Howard
- 1986
- JVSTA
PaperLangmuir probe characterization of magnetron operation
- H.R. Kaufman
- S.M. Rossnagel
- 1986
- JVSTA
PaperProperties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
PaperProperties of Cr-N films produced by reactive sputtering
- K.K. Shih
- D.B. Dove
- et al.
- 1986
- JVSTA
PaperSummary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 1986
- JVSTA
Paper