Evolution of stress gradients in Cu thin films induced by capping layers
- 2010
- ADMETA 2010
Conference paper
Publications
26856 results for Science
Stabilizer subsystem codes with spatially local generators
- Sergey Bravyi
- 2010
- ITW 2010
Conference paperTransforming value perception in music information systems
- Belinda Fridey
- Jacob Cybulski
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- 2010
- AMCIS 2010
Conference paperQuantum channel capacities
- Graeme Smith
- 2010
- ITW 2010
Conference paperEnhancing mention detection using projection via aligned corpora
- Yassine Benajiba
- Imed Zitouni
- 2010
- EMNLP 2010
Conference paperComparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyond
- Valli Arunachalam
- Filippos Papadatos
- et al.
- 2010
- ADMETA 2010
Conference paperWireless networks for the smart energy grid: Application aware networks
- Adrian Clark
- Christopher J. Pavlovski
- 2010
- IMECS 2010
Conference paperProcessing and moisture effects on TDDB for Cu/ULK BEOL structures
- Eric G. Liniger
- T.M. Shaw
- et al.
- 2010
- ADMETA 2010
Conference paperWafer scale fabrication of carbon nanotube FETs with embedded poly-gates
- Shu-Jen Han
- Josephine Chang
- et al.
- 2010
- IEDM 2010
Conference paperHigh reliability 32 nm Cu/ULK BEOL based on PVD CuMn seed, and its extendibility
- Takeshi Nogami
- Tibor Bolom
- et al.
- 2010
- IEDM 2010
Conference paper