Past, present, and future of backscatter electron (BSE) imaging
- Oliver C. Wells
- Michael S. Gordon
- et al.
- 2012
- ScMi 2012
Publications
3593 results for Mathematical Sciences
Bilevel derivative-free optimization and its application to robust optimization
- Andrew R. Conn
- L.N. Vicente
- 2012
- Optimization Methods and Software
EUV mask line edge roughness
- Amy E. Zweber
- Emily Gallagher
- et al.
- 2012
- SPIE Advanced Lithography 2012
Process optimization through model based SRAF printing prediction
- Ramya Viswanathan
- Jaione Tirapu Azpiroz
- et al.
- 2012
- SPIE Advanced Lithography 2012
Lens heating challenges for negative tone develop layers with freeform illumination: A comparative study of experimental vs. simulated results
- Scott Halle
- Michael Crouse
- et al.
- 2012
- SPIE Advanced Lithography 2012
Computing exact Fourier series coefficients of IC rectilinear polygons from low-resolution fast Fourier coefficients
- Robin Scheibler
- Paul Hurley
- 2012
- SPIE Advanced Lithography 2012
Fast source independent estimation of lithographic difficulty supporting large scale source optimization
- David Demaris
- Maria Gabrani
- et al.
- 2012
- SPIE Advanced Lithography 2012
Pattern collapse mitigation strategies for EUV Lithography
- Dario L. Goldfarb
- Robert L. Bruce
- et al.
- 2012
- SPIE Advanced Lithography 2012
Trainable convolution filters and their application to face recognition
- Ritwik Kumar
- Arunava Banerjee
- et al.
- 2012
- IEEE TPAMI
Conductive layer for charge dissipation during electron-beam exposures
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012