Bounding the Systematic Error in Quantum Error Mitigation due to Model Violation
- L.C.G. Govia
- S. Majumder
- et al.
- 2025
- PRX Quantum
Publications
3594 results for Mathematical Sciences
Wet clean oxidation for optimal line width and LER
- Steven McDermott
- Keith Donegan
- et al.
- 2025
- SPIE Advanced Lithography 2025
The Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- 2025
- SPIE Advanced Lithography 2025
Higher Order Graph Attention Probabilistic Walk Networks
- Thomas Bailie
- Yun Singh Koh
- et al.
- 2025
- AAAI 2025
A General Control-Theoretic Approach for Reinforcement Learning: Theory and Algorithms
- Weiqin Chen
- Mark Squillante
- et al.
- 2025
- AAAI 2025
SPRIG: Stackelberg Perception-Reinforcement Learning with Internal Game Dynamics
- Fernando Martinez
- Juntao Chen
- et al.
- 2025
- AAAI 2025
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- EuiJin Ko
- YooRim Jang
- et al.
- 2025
- SPIE Advanced Lithography 2025
New Photoacid Generators Designed for Advanced EUV Patterning
- Kamal P. Pandey
- Emad Aqad
- et al.
- 2025
- SPIE Advanced Lithography 2025
Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- Cong Liu
- Joseph Lachowski
- et al.
- 2025
- SPIE Advanced Lithography 2025