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Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 FilmsD.W. DongE.A. Ireneet al.2019JES
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The Etching of Crystallographically Determined Orifices in SapphireA. ReismanM. Berkenblitet al.2019JES
Fabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser ArraysMichael J. Brady2019JES