Publications

176 results at JVSTA

Calorimetry in thin film processing
- - S. Shivashankar
  - B. Robinson
- 1986
- JVSTA
Synchrotron-radiation excited carbon is photoemission study of Cr/organic polymer interfaces
- - J.L. Jordan
  - P.N. Sanda
  - et al.
- 1986
- JVSTA
Summary Abstract: High temperature decomposition of SiO₂at the Si/SiO₂ interface
- - G.W. Rubloff
  - R.M. Tromp
  - et al.
- 1986
- JVSTA
Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
- - G.S. Oehrlein
  - J.G. Clabes
  - et al.
- 1986
- JVSTA
Interaction of metals with model polymer surfaces: Core level photoemission studies
- - P.N. Sanda
  - J.W. Bartha
  - et al.
- 1986
- JVSTA
Summary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfaces
- - J.E. Demuth
  - T.C. Clark
- 1986
- JVSTA
Reactive radio frequency sputter deposition of higher nitrides of titanium, zirconium, and hafnium
- - D.S. Yee
  - J.J. Cuomo
  - et al.
- 1986
- JVSTA
Summary Abstract: Diagnostics in plasma processing
- - J.W. Coburn
- 1986
- JVSTA
Surface processes leading to carbon contamination of photochemically deposited copper films
- - F.A. Houle
  - R.J. Wilson
  - et al.
- 1986
- JVSTA
Thin films for magnetic recording technology: A review
- - J.K. Howard
- 1986
- JVSTA