Publications

233 results at Proceedings of SPIE 1989

Chemical and physical aspects of multilayer resist processing
- - J. Paraszczak
  - E. Babich
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Two-regime ablative hole formation process in tellurium and tellurium-alloy films
- - M. Chen
  - V. Marrello
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Reading and writing of photochemical holes using gaalas diode lasers
- - P. Pokrowsky
  - W.E. Moerner
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Critical issues in high density magnetic and optical data storage
- - Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Conference paper
Zero-Misalignment lithographic process using a photoresist with wavelength-selected tone
- - William D. Hinsberg
  - Scott A. MacDonald
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Practical characterization of 0.5 μm optical lithography
- - Donis G. Flagello
  - Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Conference paper
Aqueous base developable deep uv resist systems based on novel monomeric and polymeric dissolution inhibitors
- - Hiroshi Ito
- 1989
- Proceedings of SPIE 1989
Conference paper
Chromium mask damage in excimer laser projection processing
- - J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Conference paper
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- - J. Krishnaswamy
  - G.J. Collins
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
A double crystal multilayer x-ray monochromator
- - L. Golub
  - A. Quillen
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper