A Novel Borderless Contact/Interconnect Technology Using Aluminum Oxide Etch Stop for High Performance SRAM and Logic
- S. Subbanna
- D.L. Harame
- et al.
- 1993
- IEDM 1993
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14207 results for Physical Sciences
Vertical Profile Optimization of Very High Frequency Epitaxial Si- and SiGe-Base Bipolar Transistors
- E.F. Crabbé
- B.S. Meyerson
- et al.
- 1993
- IEDM 1993
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- Y. Taur
- S.J. Wind
- et al.
- 1993
- IEDM 1993
A DUAL DAMASCENE HARD METAL CAPPED CU AND AL-ALLOY FOR INTERCONNECT WIRING OF ULSI CIRCUITS
- H. Dalai
- R.V. Joshi
- et al.
- 1993
- IEDM 1993
High transconductance n- and p-channel GaAs MESFETs using novel amphipolar Cu3Ge ohmic contacts
- C.L. Lin
- M.O. Aboelfotoh
- et al.
- 1993
- IEDM 1993
Electrodeposited gold;real times stress and structural chance at room temperature
- R.E. Acosta
- I. Babich
- et al.
- 1993
- MRS Spring Meeting 1993
Preparation and in-situ surface analysis of MNFE/NIFE exchange structures: interfacial impurity incorporation
- Susan L. Choen
- John M. Baker
- et al.
- 1993
- MRS Spring Meeting 1993
Growth temperature dependence of magnetoresistance in co/cu (III) wedged superlattices
- G.R. Harp
- S.S.P. Parkin
- et al.
- 1993
- MRS Spring Meeting 1993
Magneto-optical spectra of CoPt3: experiments and first principles calculations
- D. Weller
- J. Sticht
- et al.
- 1993
- MRS Spring Meeting 1993
Preparation of hydrogen passivated silicon for UHV-CVD low temperature epitaxy
- S.L. Cohen
- 1993
- MRS Spring Meeting 1993