Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We present simulation friendly detectability conditions for 2D Navier–Stokes Equation (NSE) with periodic boundary conditions, and describe a generic class of “detectable” observation operators: it includes pointwise evaluation of NSE's solution at interpolation nodes, and spatial average measurements. For “detectable” observation operators we design a global infinite-dimensional observer for NSE with uncertain possibly destabilizing inputs: in our numerical experiments we illustrate H1-sensitivity of NSE to small perturbations of initial conditions, yet the observer converges for known and uncertain inputs.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Charles Micchelli
Journal of Approximation Theory