Influence of substrate temperature during sputter deposition on the subsequent formation of titanium disilicide
- A.S. Özean
- K.F. Ludwig Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
14468 results for Physical Sciences
Power-constrained device and technology design for the end of scaling
- David J. Frank
- 2002
- IEDM 2002
Conference paperResist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
Conference paperCarbon nanotube electronics
- Phaedon Avouris
- Joerg Appenzeller
- et al.
- 2002
- IEDM 2002
Conference paperMARS2: An advanced femtosecond laser mask repair tool
- Alfred Wagner
- Richard Haight
- et al.
- 2002
- SPIE Photomask Technology 2002
Conference paperPerformance enhancement on sub-70 nm strained silicon SOI MOSFETS on ultra-thin thermally mixed strained silicon/SiGe on insulator(TM-SGOI) substrate with raised S/D
- B.H. Lee
- A.C. Mocuta
- et al.
- 2002
- IEDM 2002
Conference paperLow field mobility characteristics of sub-100 nm unstrained and strained Si MOSFETs
- K. Rim
- S. Narasimha
- et al.
- 2002
- IEDM 2002
Conference paperNoise performance of a low base resistance 200 GHz SiGe technology
- D.R. Greenberg
- B. Jagannathan
- et al.
- 2002
- IEDM 2002
Conference paperCompact and robust 10 to 40 GHz optical time-domain multiplexer based on high-index-contrast silicon-oxynitride waveguide technology
- Roger F. Dangel
- Bert J. Offrein
- et al.
- 2002
- SPIE Photonics Fabrication Europe 2002
Conference paperQDAME simulation of 7.5 nm double-gate Si nFETs with differing access geometries
- S.E. Laux
- A. Kumar
- et al.
- 2002
- IEDM 2002
Conference paper