Oxygen transport in high-κ/ metal gate stacks and physical characterization by SIMS using isotope labeled oxygen
- Marinus Hopstaken
- John Bruley
- et al.
- 2010
- ECS Transactions
Conference paper
Publications
33 results at ECS Transactions
Low-temperature epitaxial growth of Si, SiGe, Ge, and SiC in a 300mm UHV/CVD reactor
- Thomas N. Adam
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paperThe role of oxygen in the development of Hf-base high-k/metal gate stacks for CMOS technologies
- E. Cartier
- 2010
- ECS Transactions
Conference paper