Lens heating challenges for negative tone develop layers with freeform illumination: A comparative study of experimental vs. simulated results
- Scott Halle
- Michael Crouse
- et al.
- 2012
- SPIE Advanced Lithography 2012
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3508 results for Mathematical Sciences
Dose-focus monitor technique using CD-SEM and application to local variation analysis
- Shoji Hotta
- Timothy Brunner
- et al.
- 2012
- SPIE Advanced Lithography 2012
Bridging CD metrology gaps of advanced patterning with assistance of nanomolding
- Narender Rana
- Dario Goldfarb
- 2012
- SPIE Advanced Lithography 2012
Conductive layer for charge dissipation during electron-beam exposures
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
High order wafer alignment in manufacturing
- Michael Pike
- Nelson Felix
- et al.
- 2012
- SPIE Advanced Lithography 2012
Thin-film platinum nanowires as sub-wavelength bolometers
- Pauline Renoux
- Alice Beauny
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Rare-earth-doped materials with application to optical signal processing, quantum information science, and medical imaging technology
- R.L. Cone
- C.W. Thiel
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Multicore fiber link demonstrating large bandwidth density for future multimode optical interconnects
- Benjamin G. Lee
- Christian Baks
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Link power budget advantage in GI-core polymer optical waveguide link for optical printed circuit boards
- Sho Yakabe
- Takaaki Ishigure
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012