Auger analyzer translation using ball bushings
- M.C. Reuter
- R.M. Tromp
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Properties of hydrocarbon polymer films containing metal clusters
- Christian Laurent
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Advances in vacuum contamination control for electronic materials processing
- John F. O'Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Metal-induced impurity states at the inP/transition-metal interface
- F. Schaffler
- W. Drube
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electronically excited photodissociation and desorption of molecules on surfaces
- T.J. Chuang
- K. Domen
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Theory of thin-film orientation by ion bombardment during deposition
- R. Mark Bradley
- James M.E. Harper
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films