In-situ study of Ti/TiN stability under nitrogen anneal
- P. DeHaven
- K.P. Rodbell
- et al.
- 1999
- MRS Spring Meeting 1999
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14204 results for Physical Sciences
High-dielectric constant insulators and the AMLCD process: is amorphous BST a candidate?
- P. Andry
- D.A. Neumayer
- et al.
- 1999
- MRS Spring Meeting 1999
Physics of organic light-emitting devices
- J.C. Scott
- George G. Malliaras
- et al.
- 1999
- MRS Spring Meeting 1999
Functional high-speed characterization and modeling of a six-layer copper wiring structure and performance comparison with aluminum on-chip interconnections
- A. Deutsch
- H. Harrer
- et al.
- 1998
- IEDM 1998
Scalability of SOI technology into 0.13 μm 1.2 V CMOS generation
- E. Leobandung
- M. Sherony
- et al.
- 1998
- IEDM 1998
Straddle-gate transistor: Changing MOSFET channel length between off- and on-state towards achieving tunneling-defined limit of field-effect
- S. Tiwari
- J.J. Welser
- et al.
- 1998
- IEDM 1998
High-performance sub-0.08 μm CMOS with dual gate oxide and 9.7 ps inverter delay
- M. Hargrove
- S.W. Crowder
- et al.
- 1998
- IEDM 1998
Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Use of micro-mechanical techniques, AFM and MFM to access surface deformation in multilayered thin films
- T.W. Wu
- J.E. Frommer
- 1998
- MRS Spring Meeting 1998
Experimental investigations of the Sneddon solution and an improved solution for the analysis of nanoindentation data
- J.C. Hay
- G.M. Pharr
- 1998
- MRS Spring Meeting 1998