RD3D 〈Computer Simulation of Resist Development in Three Dimensions〉
- Fletcher Jones
- Jurij Paraszczak
- 1981
- IEEE T-ED
Publications
465 results at IEEE T-ED
Resolution and Linewidth Tolerances in Electron Beam and Optical Projection Lithography
- Tung Symon Chang
- David F. Kyser
- et al.
- 1981
- IEEE T-ED
Device Characterization of an Electron-Beam-Switched Thin-Film ZnS:Mn Electroluminescent Faceplate
- Omesh Sahni
- Paul M. Alt
- et al.
- 1981
- IEEE T-ED
Josephson Edge-Junction Devices Using E-Beam Lithography
- Peter Vettiger
- David F. Moore
- et al.
- 1981
- IEEE T-ED
Importance of Boundary Conditions to Conduction in Short Samples
- James J. Rosenberg
- Ellen J. Yoffa
- et al.
- 1981
- IEEE T-ED
The Effect of Concrete Shielding on Cosmic Ray Induced Soft Fails in Electronic Systems
- James F. Ziegler
- 1981
- IEEE T-ED
The Pressure Dependence of the Bistable Voltage Margin of an AC Plasma Panel Cell
- Omesh Sahni
- M.O. Aboelefotoh
- 1981
- IEEE T-ED
IVA-7 Surface Layer Impurity Accumulation Due to Evaporation of GaAs During Annealing
- J. Woodall
- H. Rupprecht
- et al.
- 1981
- IEEE T-ED
Optical Switching in Thin Film Electroluminescent Devices with Inherent Memory Characteristics
- Omesh Sahni
- Webster E. Howard
- et al.
- 1981
- IEEE T-ED
Threshold Voltage Characteristics of Depletion-Mode MOSFET's
- Matthew R. Wordeman
- Robert H. Dennard
- 1981
- IEEE T-ED