PaperShallow silicide contacts formed by using codeposited Pt2Si and Pt1.2Si filmsM. Eizenberg, H. Föll, et al.Applied Physics Letters
PaperFormation and crystallization of amorphous silicides at the interface between thin metal and amorphous silicon filmsS.R. Herd, K.Y. Ahn, et al.Thin Solid Films
PaperFormation of shallow silicide contacts of high Schottky barrier on Si: Alloying Pd and Pt with W versus alloying Pd and Pt with SiM. Eizenberg, K.N. TuJournal of Applied Physics
