Fully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- Philip J. Coane
- Kaolin G. Chiong
- et al.
- 1993
- Microlithography 1993
Conference paper
Publications
22 results at Microlithography 1993
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
Conference paper