Optimizing Models Based OPC fragmentation using genetic algorithms
- Domenico A. Dipaola
- Ian Mobert
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Conference paper
Publications
14468 results for Physical Sciences
A statistical study of magnetic tunnel junctions for high-density spin torque transfer-MRAM (STT-MRAM)
- R. Beach
- T. Min
- et al.
- 2008
- IEDM 2008
Conference paperDemonstration of highly scaled FinFET SRAM cells with high-Κ/metal gate and investigation of characteristic variability for the 32 nm node and beyond
- H. Kawasaki
- M. Khater
- et al.
- 2008
- IEDM 2008
Conference paperYield monitor for embedded-SiGe process optimization
- Xu Ouyang
- Shwu-Jen Jeng
- et al.
- 2008
- ICSICT 2008
Conference paperWavefront generated by reflection of a plane wave from a conic section
- John A. Hoffnagle
- David L. Shealy
- 2008
- SPIE Optical Engineering + Applications 2008
Conference paperImprovements in accuracy of dense OPC models
- Chidam Kallingal
- James Oberschmidt
- et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Conference paperResist-based polarization monitoring for 193nm high-numerical aperture lithography
- Richard Tu
- Gregory McIntyre
- 2008
- Lithography Asia 2008
Conference paperEffect of porogen molecular architecture and loading on structure of porous thin films
- Hae-Jeong Lee
- Christopher L. Soles
- et al.
- 2008
- Chemistry of Materials
PaperStrong photoluminescence at 1540 nm from Er-doped amorphous silicon oxycarbide: A novel silicon material for photonic applications
- Spyros Gallis
- Vasileios Nikas
- et al.
- 2008
- SPIE Nanoscience + Engineering 2008
Conference paperCarbon nanotubes and optical confinement - Controlling light emission in nanophotonic devices
- Mathias Steiner
- Fengnian Xia
- et al.
- 2008
- SPIE Nanoscience + Engineering 2008
Conference paper