Properties of selective low pressure chemically vapor deposited tungsten films produced by hydrogen reduction in a cold wall system
- R.V. Joshi
- D.A. Smith
- et al.
- 1988
- Thin Solid Films
Publications
3526 results for Materials Discovery
Promotion of dissociative chemisorption with vibrational and translational energy
- C.T. Rettner
- H.E. Pfnür
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
On the effect of Knudsen-layer formation on studies of vaporization, sputtering, and desorption
- Roger Kelly
- R.W. Dreyfus
- 1988
- Surface Science
Theory of the local tunneling spectrum of a vibrating adsorbate
- A. Baratoff
- B.N.J. Persson
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Atomic force microscopy studies of frictional forces and of force effects in scanning tunneling microscopy
- C. Mathew Mate
- Ragnar Erlandsson
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Voltage-dependent scanning tunneling microscopy imaging of semiconductor surfaces
- Joseph A. Stroscio
- D.M. Newns
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Analysis of Co-doped iron oxide thin films by grazing incidence x-ray diffraction
- Michael F. Toney
- Ting C. Huang
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Transient fluorocarbon film thickness effects near the silicon dioxide/silicon interface in selective silicon dioxide reactive ion etching
- Mark A. Jaso
- Gottlieb S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Desorption dynamics of SiF4etch product
- F.A. Houle
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films