Publications

3526 results for Materials Discovery

CW and pulsed UV laser-induced deposition from Cr(CO)₆, Mo(CO)₆, and W(CO)₆
- - Robert L. Jackson
  - George W. Tyndall
  - et al.
- 1989
- Applied Surface Science
Scanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- - U.K. Köhler
  - J.E. Demuth
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- - A. Charai
  - S.E. Harnstram
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radical formation and surface reaction induced by laser radiation in the C11212-Al system
- - A. Modi
  - K. Domen
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A process for improved Al (Cu) reactive ion etching
- - C.-K. Hu
  - B. Canney
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface analysis of realistic semiconductor microstructures
- - Gottlieb S. Oehrlein
  - Kevin K. Chan
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gate materials consideration for submicron CMOS
- - C.-Y. Ting
  - B. Davari
- 1989
- Applied Surface Science
Some properties of Cr_xV_1-xSi₂ and Cr_xMo_1-xSi₂ thin films
- - O. Thomas
  - Steve Molis
  - et al.
- 1989
- Applied Surface Science
The physics of hot-electron degradation of Si MOSFET's: Can we understand it?
- - M.V. Fischetti
  - S.E. Laux
  - et al.
- 1989
- Applied Surface Science
Reaction kinetics of surface silicon hydrides
- - C. Michael Greenlief
  - Stephen M. Gates
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films