In situ laser diagnostic studies of plasma-generated particulate contamination
- G.S. Selwyn
- J. Singh
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
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- Materials Discovery
3488 results for Materials Discovery
High-rate reactive sputter deposition of aluminum oxide
- Fletcher Jones
- Joseph Logan
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The determination of structure in small supported metal particles by scanning transmission electron diffraction
- H. Poppa
- R.D. Moorhead
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A study by scanning electron microscopy of magnetic head-tape interface sliding
- S.J. Calabrese
- B. Bhushan
- et al.
- 1989
- Wear
A study of voids in sputtered Si02
- Mitchell J. Hait
- Harris C. Jones
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission characterization of a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dry etching damage of silicon: A review
- Gottlieb S. Oehrlein
- 1989
- Materials Science and Engineering B
Evolution and chemical state of oxygen upon acid dissolution of YBa2Cu3O6.98
- M.W. Shafer
- R.A. de Groot
- et al.
- 1989
- Materials Research Bulletin
Photoluminescence of defects introduced by deuterium plasmas in silicon
- H. Weman
- J.L. Lindström
- et al.
- 1989
- Materials Science and Engineering B
Metallurgical topics in silicon device interconnections: Thin film stresses
- F.M. D’Heurle
- 1989
- International Materials Reviews