High rate radio frequency sputtering using in-phase plasma confinement
- James E. Lucy
- John Costable
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3527 results for Materials Discovery
Ion temperature gradient driven turbulence in the weak density gradient limit
- Satoshi Hamaguchi
- Wendell Horton
- 1990
- Physics of Fluids B
X-ray reflectivity study of Si02on Si
- A.A. Bright
- G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The physical description of films coating quartz resonators
- K.Keiji Kanazawa
- 1990
- Thin Solid Films
A study of modified polyimide surfaces as related to adhesion
- D-Y. Shih
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation controlled phase selection in vanadium/amorphous silicon multilayer thin films
- R.R. de Avillez
- E. Ma
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gap optimization and homogenization of an externally pressurized air bearing
- Michel P. Robert
- Ferdinand Hendriks
- 1990
- Tribology Transactions
The importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of silicon using bromine containing plasmas
- Tim D. Bestwick
- Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films