TIN formed by ion beam nitriding of TiSi2
- S.E. Harnstrarn
- D. Moy
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
Date
Featured collections
Popular topics
357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Energetic particle bombardment of films during magnetron sputtering
- S.M. Rossnage
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of the copper-epoxy adhesion interface from production printed circuit boards
- P.C. Laberge
- C. Miller
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure of Cs on GaAs(110) as determined by scanning tunneling microscopy
- P.N. First
- R.A. Dragoset
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure and properties of dual ion beam sputtered tungsten film
- A.S. Kao
- V. Novotny
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The chemical interaction of Mn with the MoS2(0001) surface studied by high-resolution photoelectron spectroscopy
- Jeffrey R. Lince
- Thomas B. Stewart
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Competitive reactions of fluorine and oxygen with W, WSi2, and Si surfaces in reactive ion etching using CF4/O2
- Gottlieb S. Oehrlein
- J. Lennart Lindsöm
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- U.K. Köhler
- J.E. Demuth
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films