Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
The structure of the Si(111)-CaF2 interface has been determined with medium-energy ion scattering and high-resolution transmission electron microscopy. The interface structure is closely related to the bulk crystal structure of CaSi2. The interface is deficient in F, resulting in Si-Ca bonding and a charge-neutral interface. © 1989, American Vacuum Society. All rights reserved.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Mark W. Dowley
Solid State Communications
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
M. Hargrove, S.W. Crowder, et al.
IEDM 1998