Kinetics and mechanics of Si2H6 surface decomposition on Si
- C.M. Greenlief
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- Materials Discovery
3488 results for Materials Discovery
Kinetics of physical adsorption of ethane on lr(110)-(1 × 2): Molecular beam reflectivity measurements and Monte Carlo simulations
- W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface reactions in Si chemical vapor deposition from silane
- S.K. Kuikarni
- H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Chemistry and adhesion of metal-polymer interfaces
- P.S. Ho
- 1990
- Applied Surface Science
Ion energy measurements at the surface of an ion cyclotron range of frequencies antenna faraday shield
- D.J. Hoffman
- R.A. Langley
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of silicon using bromine containing plasmas
- Tim D. Bestwick
- Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spontaneous decomposition of dimethyl gold hexafluoroacetylacetonate on ion bombarded surfaces
- A. Wagner
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
integrated thermal chemical vapor deposition processing for Si technology
- M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Process effects on radio frequency diode reactively sputtered ZrO2films
- M.M. Yang
- T.M. Reith
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Localized charge force microscopy
- B.D. Terris
- J.E. Stern
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films