Roughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- C.L. Wang
- M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ laser diagnostic studies of plasma-generated particulate contamination
- G.S. Selwyn
- J. Singh
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMolecular-beam studies of the precursor-mediated dissociative chemisorption of N2 on W(100)
- C.T. Rettner
- E. Schweizer
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMicrostructure and properties of dual ion beam sputtered tungsten film
- A.S. Kao
- V. Novotny
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh-rate reactive sputter deposition of aluminum oxide
- Fletcher Jones
- Joseph Logan
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe angular dependence of preferential sputtering and composition in aluminum-copper thin films
- P. Rudeck
- J.M.E. Harper
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGas/surface reactions in the chemical vapor deposition of tungsten using WF6/SiH4mixtures
- Ming L. Yu
- Benjamin N. Eldridge
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperScanning tunneling microscopy study of low-temperature epitaxial growth of silicon on sI(111 )-(7×7)
- U.K. Köhler
- J.E. Demuth
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA study of voids in sputtered Si02
- Mitchell J. Hait
- Harris C. Jones
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperOptical emission characterization of a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper