Ion energy measurements at the surface of an ion cyclotron range of frequencies antenna faraday shield
- D.J. Hoffman
- R.A. Langley
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An aerosol model of particle generation during pressure reduction
- J.J. Wu
- Douglas W. Cooper
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSlope control of molybdenum lines etched with reactive ion etching
- Yue Kuo
- J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paperintegrated thermal chemical vapor deposition processing for Si technology
- M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGrowth of CoSi2on Si(001): Structure, defects, and resistivity
- R.D. Thompson
- S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDensity dependence of the electrochemical characteristics of carbon overcoated thin film media
- Grace L. Gorman
- John Duran
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDefect microchemistry in Si02/Si structures
- G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface diffractometry and lattice imaging of scanning tunneling microscopy images
- J.E. Demuth
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe angular dependence of preferential sputtering and composition in aluminum-copper thin films
- P. Rudeck
- J.M.E. Harper
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paperinterface states and Schottky barrier formation at metal/GaAs junctions
- R.E. Viturrc
- C. Mailhiot
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper