Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Initial stage deposition of Ag on the Si (100)2x1 surface studied by scanning tunneling microscopy
- T. Hashizume
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperScanning probe microscopy: Current status and future trends
- H. Kumar Wickramasinghe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperNucleation controlled phase selection in vanadium/amorphous silicon multilayer thin films
- R.R. de Avillez
- E. Ma
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperScanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface
- P. Martensson
- R.M. Feenstra
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper(100) and (111) Ni films epitaxially grown on Cu by the metal-metal epitaxy on silicon technique near room temperatures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperProperties of W-N and Mo-N films prepared by reactive sputtering
- K.K. Shih
- D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA He and Ne diffraction study of the W(100) phase transition
- E. Schweizer
- C.T. Rettner
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA process for improved Al (Cu) reactive ion etching
- C.-K. Hu
- B. Canney
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper