Mechanism of silicon surface roughening by reactive ion etching
- Gottlieb S. Oehrlein
- Robert G. Schad
- et al.
- 2004
- Surface and Interface Analysis
Paper
Publications
19 results at Surface and Interface Analysis
A possible solution to the problem of compositional change with ion‐bombarded oxides
- Imre Bertóti
- Roger Kelly
- et al.
- 2004
- Surface and Interface Analysis
PaperVoltage contrast XPS—a novel scheme for spatially resolved XPS studies
- John J. Boland
- 2004
- Surface and Interface Analysis
PaperAdhesion of copper and chromium films to polyimide studied by static SIMS of the interface
- W.J. van Ooij
- R.H.G. Brinkhuis
- et al.
- 2004
- Surface and Interface Analysis
PaperInvestigation of gallium arsenide multilayer structures using a tunnelling microscope combined with a UHV‐SEM
- O. Albrektsen
- H. Salemink
- 2004
- Surface and Interface Analysis
PaperOn the role of Gibbsian segregation in causing preferential sputtering
- Roger Kelly
- 2004
- Surface and Interface Analysis
ReviewToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
PaperSurface potential studies of self-assembling monolayers using Kelvin probe force microscopy
- J. Lü
- L. Eng
- et al.
- 1999
- Surface and Interface Analysis
PaperConservative and dissipative interactions in dynamic force microscopy
- U. Dürig
- 1999
- Surface and Interface Analysis
Paper