Publications

18 results at Journal of Vacuum Science and Technology B

Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- - David O. S. Melville
  - Alan E. Rosenbluth
  - et al.
- 2011
- Journal of Vacuum Science and Technology B
Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- - Marinus Hopstaken
  - Michael Gordon
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
- - Christos Dimitrakopoulos
  - Yu-Ming Lin
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Formation of epitaxial graphene on SiC(0001) using vacuum or argon environments
- - Luxmi
  - N. Srivastava
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Contacting self-ordered molecular wires by nanostencil lithography
- - L. Gross
  - R.R. Schlittler
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Interaction of NiSi with dopants for metallic source/drain applications
- - Jun Luo
  - Zhi-Jun Qiu
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Dopant measurements in semiconductors with atom probe tomography
- - P.A. Ronsheim
  - M. Hatzistergos
  - et al.
- 2010
- Journal of Vacuum Science and Technology B
Phase change memory technology
- - Geoffrey W. Burr
  - Matthew J. Breitwisch
  - et al.
- 2010
- Journal of Vacuum Science and Technology B