Enhancing resolution with pupil filtering for projection printing systems with fixed or restricted illumination angular distribution
- Greg McIntyre
- Leon Teeuwen
- et al.
- 2013
- SPIE Advanced Lithography 2013
Publications
14 results at SPIE Advanced Lithography 2013
On the accuracy of different Fourier transforms of VLSI designs
- Rajai Nasser
- Paul Hurley
- 2013
- SPIE Advanced Lithography 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Deterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013