Effect of contact implants on the patterning of tungsten damascene interconnects
- J.P. Gambino
- M.A. Jaso
- et al.
- 1996
- MRS Spring Meeting 1996
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14 results at MRS Spring Meeting 1996
0.1 μm technology and BEOL
- T.H. Ning
- 1996
- MRS Spring Meeting 1996
Copper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- T.M. Shaw
- C.-K. Hu
- et al.
- 1996
- MRS Spring Meeting 1996
Nanofoam porosity measured by infrared spectroscopy and refractive index
- M.I. Sanchez
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996