High-performance nMOSFET with in-situ phosphorus-doped embedded Si:C (ISPD eSi:C) source-drain stressorB. YangR. Takalkaret al.2008IEDM 2008
Demonstration of highly scaled FinFET SRAM cells with high-Κ/metal gate and investigation of characteristic variability for the 32 nm node and beyondH. KawasakiM. Khateret al.2008IEDM 2008
Gate length scaling and high drive currents enabled for high performance SOI technology using high-κ/metal gateK. HensonH. Buet al.2008IEDM 2008
On the difference of temperature dependence of metal gate and poly gate SOI MOSFET threshold voltagesShu-Jen HanXinlin Wanget al.2008IEDM 2008