Examination of uncoated photoresist by the low-loss electron method in the scanning electron microscope
- Oliver C. Wells
- Ping-Chin Cheng
- 1987
- Journal of Applied Physics
Paper
Publications
2360 results at Journal of Applied Physics
Transient conductivity studies in tellurium thin films
- W. Pamler
- E.E. Marinero
- 1987
- Journal of Applied Physics
PaperTitanium-tungsten contacts to silicon. II. Stability against aluminum penetration
- S.E. Babcock
- K.N. Tu
- 1986
- Journal of Applied Physics
PaperDynamics of UV laser ablation of organic polymer surfaces
- E. Sutcliffe
- R. Srinivasan
- 1986
- Journal of Applied Physics
PaperInfluence of gas viscosity on the photoacoustic signal in gas-microphone cells
- P. Korpiun
- B. Büchner
- et al.
- 1986
- Journal of Applied Physics
PaperEnergy band alignment in GaAs:(Al,Ga)As heterostructures: The dependence on alloy composition
- J. Batey
- S.L. Wright
- 1986
- Journal of Applied Physics
PaperOxidation temperature dependence of the dc electrical conduction characteristics and dielectric strength of thin Ta2O5 films on silicon
- G.S. Oehrlein
- 1986
- Journal of Applied Physics
PaperElectrical conduction in polyimide films
- G.M. Sessler
- B. Hahn
- et al.
- 1986
- Journal of Applied Physics
PaperInfrared thermal particle detection physics
- S. Utterback
- R.L. Melcher
- 1986
- Journal of Applied Physics
PaperFormation of intermediate phases, Ni3Si2 and Pt 6Si5: Nucleation, identification, and resistivity
- P. Gas
- F.M. D'Heurle
- et al.
- 1986
- Journal of Applied Physics
Paper