O. Wolter, J. Greschner, et al.
Microelectronic Engineering
Near-field optical-scanning (NFOS) microscopy or]] optical stethoscopy" provides images with resolution in the 20-nm range, i.e., a very small fraction of an optical wavelength. Scan images of metal films with fine structures presented in this paper convincingly demonstrate this resolution capability. Design of an NFOS microscope with tunnel distance regulation, its theoretical background, application potential, and limitations are discussed.
O. Wolter, J. Greschner, et al.
Microelectronic Engineering
D. Pohl, J.K. Gimzewski
Optics in Complex Systems 1990
D. Pohl, W. Denk, et al.
Proceedings of SPIE 1989
A. Schirmeisen, G. Cross, et al.
New Journal of Physics