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- 1999
- Linear Algebra and Its Applications
Paper
Publications
3605 results for Mathematical Sciences
Calculation of spreading profiles for molecularly-thin films from surface energy gradients
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- 1999
- Journal of Non-Newtonian Fluid Mechanics
PaperA construction of interpolating wavelets on invariant sets
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- 1999
- Mathematics of Computation
PaperApproach to pattern aspect ratio control
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- 1999
- SPIE Advanced Lithography 1999
Conference paperApproaches to etch resistant 193-nm photoresists: Performance and prospects
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- Juliann Opitz
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
PaperDevelopment of an incremental structural parameter model for predicting reactive ion etch rates of 193 nm photoresist polymers
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- 1999
- SPIE Advances in Resist Technology and Processing 1999
PaperHot electron emission lithography
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- Microlithography 1999
Conference paperAerial image contrast using interferometric lithography: Effect on line-edge roughness
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- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paperPolymer platform dependent characteristics of 193 nm photoresists
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- SPIE Advances in Resist Technology and Processing 1999
Conference paperExperimental method for quantifying acid diffusion in chemically amplified resists
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- W.D. Hinsberg
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- SPIE Advances in Resist Technology and Processing 1999
Conference paper