Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
In 1991 Lorentzen and Nilsen showed how to use linear programming to prove lower bounds on the size of difference triangle sets. In this note we show how to improve these bounds by including additional valid linear inequalities in the LP formulation. We also give some new optimal di erence triangle sets found by computer search.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007