Role of ions in reactive ion etching
- J.W. Coburn
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
3552 results for Materials Discovery
Si(100)2-1+Sb surfaces studied with photoemission and optical spectroscopy
- H. Bernhoff
- D. Purdie
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDeposition of diamondlike carbon using a planar radio frequency induction plasma
- D.L. Pappas
- J. Hod wood
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperReactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- O. Joubert
- G.S. Oehrlein
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperHot electron scattering effects in metal-semiconductor structures and their role in interface transport
- A. Bauer
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperModification of the PHI sample mount for multiple- or micropositioning for Zalar rotation
- Paul Soo
- David L. Neiman
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperGaAs, AlGaAs, and InGaAs epilayers containing As clusters: Semimetal/semiconductor composites
- M.R. Melloch
- J. Woodall
- et al.
- 1993
- Materials Science and Engineering B
PaperCusp-like flaws along a rough surface
- Jiangwei Li
- Cheng-hsin Chiu
- et al.
- 1993
- Thin Solid Films
PaperLow energy electron microscopy studies of Ge and Ag growth on Si(111)
- A.W. Denier van der Gon
- R.M. Tromp
- et al.
- 1993
- Thin Solid Films
PaperNanotribology of lubricated and unlubricated carbon overcoats on magnetic disks studied by friction force microscopy
- C.Mathew Mate
- 1993
- Surface and Coatings Technology
Paper