Vapor phase hydrocarbon removal for Si processing
- Srinandan R. Kasi
- M. Liehr
- 1990
- Applied Physics Letters
Paper
Publications
2351 results at Applied Physics Letters
Control of misoriented grains and pinholes in CoSi2 grown on Si(001)
- J.R. Jimenez
- L.M. Hsiung
- et al.
- 1990
- Applied Physics Letters
PaperHighly efficient and stable nonlinear optical polymers via chemical cross-linking under electric field
- D. Jungbauer
- B. Reck
- et al.
- 1990
- Applied Physics Letters
PaperTHz time-domain spectroscopy of high Tc substrates
- D. Grischkowsky
- Søren Keiding
- 1990
- Applied Physics Letters
PaperMagnetoresistance measurements of doping symmetry and strain effects in GaSb-AlSb quantum wells
- W. Hansen
- T.P. Smith III
- et al.
- 1990
- Applied Physics Letters
PaperDirect overwriting capability in TM-rich side rare-earth transition metal amorphous films
- Shinji Takayama
- Teruhisa Shimizu
- et al.
- 1990
- Applied Physics Letters
PaperKinetics of silicon epitaxy using SiH4 in a rapid thermal chemical vapor deposition reactor
- M. Liehr
- C.M. Greenlief
- et al.
- 1990
- Applied Physics Letters
PaperFerroelectric (Pb,Ba)Nb2O6 near the morphotropic phase boundary
- G. Burns
- F.H. Dacol
- et al.
- 1990
- Applied Physics Letters
PaperPhotoemission from thin-film lanthanum hexaboride
- P.G. May
- R. Petkie
- et al.
- 1990
- Applied Physics Letters
PaperSurface melting of metal deposits during laser-induced chemical vapor deposition with a modulated continuous-wave laser
- Paul B. Comita
- Peter E. Price Jr.
- et al.
- 1990
- Applied Physics Letters
Paper